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Keyword [Electronegative gas]
Result: 1 - 4 | Page: 1 of 1
1.
The Hybrid Simulation Of A Dual-frequency Capacitively Coupled Plasma
2.
The Studies On Instabilities In Electronegative Gas Inductively Coupled Plasma
3.
Investigations On Physical Characteristics Of Low Pressure Dual- Frequency Capacitively Coupled Electronegative Plasmas
4.
Numerical Simulation And Analytical Theory Of Spatial Characteristic Properties Of Ar/SF
6
RF Inductive Discharge
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