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Keyword [Electronegative gas]
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1. The Hybrid Simulation Of A Dual-frequency Capacitively Coupled Plasma
2. The Studies On Instabilities In Electronegative Gas Inductively Coupled Plasma
3. Investigations On Physical Characteristics Of Low Pressure Dual- Frequency Capacitively Coupled Electronegative Plasmas
4. Numerical Simulation And Analytical Theory Of Spatial Characteristic Properties Of Ar/SF6 RF Inductive Discharge
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