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Keyword [inductively coupled plasma etching]
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1. Design,Preparation And Cutting Performance Of Textured Tools Fabricated By Inductively Coupled Plasma Etching In Dry Cutting
2. Study On Dry Etching Of LiTaO3 And LiNbO3
3. Fabrication And Photoelectric Properties Of Anodic Aluminum Oxide-like Nanostructures On GaN Surface
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