Dynamics Characteristic For The Electromechanical Integrated Electrostatic Harmonic Micro Motor

Electromechanical integrated electrostatic harmonic micro-motor is a novel generalized composite drive, which integrates control, drive and transmission. The stator consists of a series of electrodes insulated between each other. The rotor consists of a thin-film which is conductive and easily deformed. The stator is excited by sequential electric field, by which the sequential deformation of the rotor is produced. When the electric field rotates by one cycle, the rotor generates a small angle displacement opposite to the direction of the rotating electric field.In this dissertation, the operation principle of the electromechanical integrated electrostatic harmonic micro-motor is introduced. The differential equation of the radial and circumferential displacements under the excited voltage is given. The displacement differential equation is obtained under the consideration of the extension and shear. By use of the coefficient comparison method, the expressions of two kinds of the displacements are induced. The change of the displacement coefficient along with the exciting voltage is given. The relationship between excited voltage and geometric and electric parameters is analyzed.The differential equation of the in-plane vibration under consideration of extension is established. The expression of natural frequency for the in-plane vibration of the rotor is given. The relationship between the natural frequency and system parameters is analyzed. Based on the mode superposition method, the in-plane forced vibration under the exciting voltage is resolved and analyzed.Based on elastic theory, the expression of the deformation energy, kinetic energy and electric field energy between the rotor and stator are induced. By use of the Hamilton principle, the expressions of the out-plane natural frequency are obtained. The change of the natural frequency along with the geometric and electric parameters is discussed.Based on the conservation of the energy theorem and Schrodinger equation, the out-plane forced vibration under the exciting voltage is studied. The expression of the forced response is obtained and the response is analyzed.The structural design of micro moving robot driven by electrostatic micro-motor is finished. The dimension of the moving equipment is determinated. The torsion vibration of the driving shaft is analyzed. The change of the torsion vibration natural frequency along with the structural parameters is discussed. The changes of the torsion forced response of the shaft are analyzed.The main factor that influents the design of the electromechanical integrated electrostatic harmonic micro-motor is analyzed. The structural and dimension design is finished. The machining process of the electrodes is given. The driving system is designed. The principle experiment of the micro motor is completed which demonstrates the correctness of the driving principle. The static deformation, In-plane and out-plane vibration of the flexible ring is simulated by ANSYS software and compared with the theoretical analysis, which demonstrates the correctness of theory analysis. By use of the workbench software, the forced vibration for micro robot system from the voltage offset is simulated.