Study On Technology And Tribological Properties Of Vapor Deposition Thin Films At Low Temperature

The vapor deposition thin films at low temperature have good process performance and tribological characteristics. Therefore, the study on vapor deposition techniques at low temperature serves practical purposes for engineering, which provides a new and effective technological solution to the surface modification of the components of temperature-sensitive materials such as low tempering materials and polymers. It certainly makes great efforts in developing environmentally-protective surface modification technology. In view of their poor resistance to wear and need for low treatment temperature of the above two materials, this paper managed to develop the technology to deposit TiN films with good properties below 140℃ using low temperature magnetron sputtering method and set up a model to calculate the substrate temperature of magnetron sputtering. DLC films were deposited at 120 ℃ using ion beam implantation assisted vapor deposition of mineral oil. Meanwhile, based on the PVD of low temperature magnetron sputtering, Cu/Cu/Ni composite films were prepared at low temperature that could be applied to the surface metal armor treatment of polymer components by combining magnetron sputtering, chemical plating and plating technologies. Moreover, a special rotating magnetron sputtering device was developed in this project to fit for depositing films in all dimensions.The study revealed that in the process of magnetron sputtering deposition, processing parameters such as ion etching, negative bias voltage, magnetic-field intensity, nitrogen flux, medial layer, surface roughness and hardness of substrate had a noticeable effect on substrate temperature, surface topography, hardness, color, interfacial binding strength and tribological properties of films. A proper and scientific control of processing parameters could reduce treatment temperature and improve the tribological properties of TiN films.The results of energy spectrum analyses, nano-hardness tests and tribological tests showed that the low temperature TiN films produced by low temperature magnetron sputtering...