Design Theory And Key Technologies For Wire Bonding System

In this dissertation, for developing a wire bonding system with the high-speed, high-precision positioning, some key technologies, such as innovation structural design, dynamic modeling, optimization of high-frequency ultrasound transducer and the corresponding matching circuit, of the 3-DOF high-speed, high-precision positioning table are studied systematically. The prototype of wire bonding precision positioning table has been developed.A new flexibility decoupling of high-speed, high-precision positioning wire bonding table with three freedoms, which is driven directly by voice coil motor, is designed. On the basis of building rigid-elastic coupling model of the precise positioning table by using virtual prototyping technology, the optimal spring stiffness and preload are determined based on dynamic response of positioning table, and the spring stiffness and preload the elastic joint structure is analyzed by using finite element method. The static and dynamic characteristics of the wire bonding precision positioning table is tested. The experiment results show that the dynamic performance of wire bonding precision positioning table is good, and it can satisfy the design requirements of the packaging table.The 98kHz high-frequency ultrasound transducer system are designed based on electromechanical equivalent circuit of this system and longitudinal vibration frequency equation deduced by using one-dimensional elastic wave theory. The initial parameters of it are determined. Then, they are optimized according to the resonator characteristics of this system. It is measured for the impedance characteristics and transmission characteristics in the direction of axial and radial vibration, and the experimental results show that it has a good vibration transmission characteristic. Based on Complicated Programmable Logic Devices (CPLD) technology, a driven power for wire bonding ultrasonic transducer system is designed. It has functions and so on amplification, filter, electric circuit match and phase-lock frequency track. Tests for vibration transfer characteristics of wire bonding ultrasonic transducer system are carried out, and the design validity of wire bonding ultrasonic transducer system is verified.A correlative performance experimental of wire bonding positioning table is tested. The results show that the maximum displacement of table is 50mm, the maximum speed and acceleration can attain 0.5m/s and 7.9g respectively, the repetition positioning precision achieve±2μm. It can also meet the requirements of limit high speed and accuracy in areas such as chip packaging.The study of this dissertation lays a foundation for the further research of wire bonding precision positioning table, and supplies referenced methods and practical experience for theoretical research of the relevant positioning system.