Preparation, Structure And Field Emission Properties Of Silicon Nanoporous Pillar Array And Its Gold / Copper Composite System

Recently, nanostructured silicon as templates in creating other nanomaterials has been widely studied. On the one hand, nanostructured silicon is compatible with conventional silicon microtechnology. So silicon-based nanomaterials fabricated on nanostructured silicon template can be applied in electronic and optical device in future. On the other hand, hiring unique morphology, structure and properties of nanostructured silicon, new specially patterned, structured or functionalized nanomaterials can be prepared on nanostructured silicon. Therefore, the morphology and structure of nanostructured silicon are important to fabricate nanomaterials. In the thesis, a new nanostructured silicon template is reported, and hiring it as template, nanostructured noble metal thin films are obtained through immersion plating method. The main conclusion in the thesis can be summarized as follows:1. Si-NPA (silicon nanoporous pillar array) is prepared by hydrothermal etching. Si-NPA is a silicon micro/nanometer structural composite system composed of triple hierarchical structures in micro and nanometer dimension, i. e., regular silicon pillar array, densely distributed nanopores on each silicon pillar, and the crystalline silicon nanoparticals composing the walls of nanopores.2. Au/Si-NPA is fabricated on Si-NPA by immersion technique. Morphologies of Au/Si-NPA fabricated on fresh and aged Si-NPA substrates, respectively, are very different due to the difference of quantities containing oxygen on the surface of fresh and aged Si-NPA. On aged Si-NPA surface, large quantities of Au particles are deposited at the valley around the silicon pillars, where the atom ratio of oxygen is relatively low. And regularly, nanostructured Au network is formed. On fresh Si-NPA surface, Au particles are deposited at every site, where the atom ratios of oxygen are low. However, size and compatibility of Au particles at different sites is different.3. The function of Si-NPA in preparing nanostructed metal film process is researched. nanostructed metal films including Au/Si-NPA, Cu/Si-NPA, and self-supported...