The Research On Dielectric Metasurface Optical Component And Its Application

Metasurface is an artificial sub-wavelength structure array.Each sub-wavelength structure can be seen as a unit to control the phase,amplitude and polarization of the electromagnetic wave.Metasurface can reconstruct the electromagnetic wavefront and possesses excellent electromagnetic wave manipulation ability.Furthermore,compared with conventional optical refractive components relying on gradual phase shift accumulated along the optical path,metasurface realizes the control of electromagnetic wavefront through the interaction between sub-wavelength structure array and electromagnetic wave.Therefore,metasurface optical components with thin thickness and light weight have the potential to realize various complex functions and satisfy the demands for miniaturization and integration of modern optical systems.Although the research works of metasurface optical components have made great achievements,further research works are necessary on achromatic components,multifunctional devices and integrated application.In above areas,we have carried out some research works and achieved following results through establishing new electromagnetic wave control theories of dielectric metasurface.(1)The theories of achromatic metasurface in long wave infrared and visible to near infrared band are established.We theoretically analyze the necessary conditions for realization of dispersion elimination,and propose the methods to construct achromatic metasurface components.Besides,two kind of achromatic metalenses in long wave infrared and visible to near infrared band are presented according to the theoretical calculation and numerical simulation.(2)We propose a hybrid flat structure consisting of DBR-metasurface-DBR-metasurface.The structure has the ability of wavelength selection and wavefront manipulation.A metasurface component with filtering and focusing functions is designed and fabricated,which can be used to construct integrated spectral detection system.Besides,we present a space multiplexing metasurface formed by the interleaved hybrid complex structures,which can achieve low-crosstalk wavelength-control to realize focusing and deflecting functions in a shared-aperture configuration.(3)The positive and negative metasurface microlenses array constructed by sub-wavelength gratings and cylinder array are designed.Then we fabricate the designedstructure by using electron beam lithography(EBL)and inductively coupled plasma(ICP)etching technology,and characterize the fabricated focusing metasurface microlenses array through optical testing system.Furthermore,we form the Galileo confocal optical system by the designed positive and negative metasurface microlenses array,and analyze the control of electromagnetic wave.Finally,a scanner based on positive and negative metasurface microlenses array is constructed.At the same time,the limiting conditions of structure parameters for the metasurface scanner are given according to theoretical calculation.(4)A method to construct multi-channel metasurface lenses array for middle and long wave infrared region is presented.To realize the application of infrared absorption sensing for ethanol,ammonia and ethylene,a multi-channel metasurface lenses array is designed and fabricated,which can focus the electromagnetic waves with four wavelengths on the same plane(corresponding to the three infrared-absorption peaks of required detection gases and a reference wavelength).Furthermore,we design an infrared spectral detector consisted of the plasmonic filters,multi-channel metasurface lenses and infrared detector array,then carry out the simulation design and experimental manufacturing of each component,which lay the foundation for the construction of an integrated multi-channel gas detector.