| As the trend for MEMS devices to become more functional and more complex continues, there is a need for assembling hybrid devices. Microassembly can also simplify the microfabrication process by improving the process yield with an optimal processing sequence. Integration of devices also enables the development of hybrid devices that cannot be microfabricated, such as microactuators incorporating hard magnetic material and high aspect ratio hybrid devices incorporating LIGA technology. The eventual commercial success of hybrid MEMS technology and other technologies handling micron scale components critically depends on the ability to economically handle, manipulate and assemble devices of these sizes in an automated fashion.; The scaling of devices poses severe challenges on their manipulation and assembly. The objective of this dissertation is to develop and demonstrate economic, repeatable microassembly with high throughput. A flexible microassembly workcell with integrated part handling skills has been developed. A vision-based control system architecture is developed to guide the micromanipulation tasks, thereby, achieving submicron positioning precision. Assembly strategies guided by self-assembly principles are developed to enable repeatable, deterministic assembly in the presence of complex interactive forces. After achieving suitable preconditions in task space, the geometric and material property dependence of these dominant interactive forces is exploited to allow for self-assembly. Electromagnetic part interactions are the focus of this dissertation, although, the concepts are applicable to all types of microparts and microforces. Experimental results validate the developed system architecture and assembly planning. |
