Research On Interferometric Measurement Of Near-cylindrical Surfaces

The interferometric testing at normal incidence is important to the manufacture of near-cylindrical surfaces。The subjects ,which are related to the testing of near-cylindrical surfaces and researched in this paper, are as follows: 1 The model of testing set is constructed using Zemax.Arrangements for the testing of different near-cylindrical surfaces can be simulated by the model. 2 The characteristics of near-cylindrical surfaces'interferograms are analyzed and the testability of all kinds of near-cylindrical surfaces is researched. 3 The optimizations of the testing sets'arrangements through the adjustment on defocus and tilts are discussed,and the shortcomings of these optimizations are discussed too. 4 The software which can simulat the application of curved surface fitting on the process of wavefront aberrations is manufactured using Matlab. 5 The characteristics of the precision in disposaling the wavefront aberrations useing curved surface fitting are researched. 6 The means are worked out to get values of the special fitting orders which lead to the highest precision of curved surface fitting. These researches on before-mentioned subjects are beneficial to improve the level of comprehension on the technology of near-cylindrical surfaces testing,and promote the application of the technology in domestic related domains.