Spectrum Analysis Of Hydrogen Plasma At Low Temperature And Low Pressure

As an excellent technology, plasma at low temperature and low pressure is widely used in energy sources, material processing, environment protection and universe science. So it is necessary to make a thorough study of the characteristic of plasma.A sort of spectrum analysis setup with high performance was established. In this article, hydrogen plasma was produced by helicon wave and the emission spectrum was detected. The electron number density N_e has been determined by using Stark broadening and the electron temperature T_e has also been obtained. At the same time the effect of various parameters on the electron number density and the electron temperature has been discussed. And it was concluded that there were several reactions which could be used to explain the effect.The main contents of this work are as follows.1. A setup with spectrum production and measurement parts was designed. The hardware included helicon wave antenna and focusing system. A +5V voltage put out from the PCL- 818HG card was connected to the numerical controller as a exterior on/off signal. Then the spectrometer began to run. In addition, a steady high voltage DC power was supplied to minimize the interference. Had been amplified by the photomultiplier tube, the plasma lights entered the weak current amplifier, then the signal was connected to the card through single ended input method. The computer automatically completed the collection. The controlling and collecting programs werewritten in QBasic.2. It was concluded that: Ne, Te and the intensities of the first three lines of Balmer series increased with RF power. And Te declined with the increase of the hydrogen flow, while Ne as well as the intensities increased with the hydrogen flow then got saturated. Te declined with the increase of the hydrogen pressure, which was different from Ne. What's most important is that, first Hq increased then reached its maximum, finally declined with the hydrogen pressure. While the intensities of Hpand H v declined with the hydrogen pressure.3. Finally, the effect of every parameter on electron number density and electron temperature was analyzed by reactions occurred in plasma. Besides, the dynamics mechanism was also analyzed according to the profile of highly resolved spectrum.