Study Of Microstrip Split-ring Resonator Used In Low-power Microwave Plasma Source

It is difficult for plasma sources to be miniaturized , especially the microplasma source based on microstrip technology is the focus of the study. With widespread usage of MEMS technology, one paid more and more attention on microplasma sources based on MEMS technology, which can be found application in bio-MEMS sterilization, small-scale materials processing , and micro ion propulsion systems. In this paper a new microstrip ring-split resonator(MSRR) used in low-power microwave plasma source is studied, the theory of MSRR and engineering design are proposed .Firstly , the basic principles of transmission line and several theories in microstrip line resonator are discussed. Secondly, according to this issue , analytical equations based on the quasi-static approximation is obtained and some conclusions of optimized design are summarized. Finally, the resonator at 2.45GHz was designed. It is confirmed that the experimental results were found to be in good agreement with simulated results.The following are the main works of this thesis : 1, Sum-up the development of traditional microplasma source, and point out thedesign advantage and shortcomings2, Detail the gas discharge and low-temperature plasma generated principles 3, Based on the quasi-static theory, analyze the microstrip resonator with two openends , and study the relations between quality factor and other parameters. 4, With numerical simulation , analyze the MSRR ,deduce each equation for input impedance , voltage and electric field distributing for directing final physical design. 5, Through numerical simulation , research on the resonance characteristics whilechanging other parameters ,to direct the final physical design. 6. Fabricate a microstrip ring-split resonator, and that the experimental results was ingood agreement with simulated results is confirmed.