Experimental Research On Buckling Of Nano-thin Film Under Dynamic Load And Finite Element Analysis

Films have been applied to kinds of engineering systems, and fit to achieve multiple functions, such as in micro electro-mechanical system and the design of the sensors, the film materials are an essential part. In transmission parts, the film materials are used of surface coating and they are effective to prevent the wear and friction. As more and more field will use the film technology, the scholars are increasingly concerning about the buckling and debonding of films, but in present, the study focuses on the buckling in static force, the research of dynamic buckling is a little, so the main work of this paper is to research the buckling of films which are deposited on the polymethyl methacrylate substrates in dynamic load, this work is important for forecasting the life of film structure.In this work, we used the video microscope and the hight speed CCD to observe the changes of film and got the buckling pictures of the Ti film, Tu film and the Ti/Ni mutilayer, found that with the release of stress, the buckling gradually released; under the same dynamic load, we finished the repeated load tests, got the force-displacement curves by use of displacement sensor and the Piezoelectric force sensor, comparison of the buckling process of different films under the dynamic load and the buckling expansion process of same films under the cycle dynamic load. The results showd that the buckling of the films had close relationship with the film material, the intensity of load and the duration of the load.In the final of this paper, use ANSYS software to simulate the buckling expansion process of Ti film which is deposited on the polymethyl methacrylate substrate, and the nonlinear springs are used to simulate the normal force of the interface, got the normal force-normal displacement curve of buckling nodes, provided the theory information for 3D film structure in finite element caculations.