The Study On Preparation And Properties Of CuO Films By Sol-gel Method And Cu/TiO_x Composite Films By Rf Magnetron Sputtering

The photo-catalytic applications of TiO₂ have widely been exploited in decomposing organic compound, sterilization, cleaning aqueous pollutants, anti-fogging, self-cleaning, and so on. This behavior deponds on the electron-hole pairs generating during the photo excitation. Noble metals (or transition metals) doping on the semiconductor surface can form the Schottky barrier, which can control the electron-hole recombination by seizing the exciting electron. Cu is an familiar metal, and its oxide is CuO. CuO as important trasition oxide is a p-type semiconductor with a band gap of 1.2eV, and also is indirect semiconductor metals. It has special characteristics in electricity, magnetics and catalysis. If crystal lattice of TiO₂ dope by Cu2+, the substances can form more electron-holes and improve the effectiveness of catalysis. In this paper, CuO films were prepared by sol-gel method. In the other hand, Cu/TiOx composite films deposited by Cu target and TiO₂ target co-sputtering with controlling them proportion. Crystal structure, surface granular structure, optical properties and hydrophilicity with different conditions were characterized by X-Ray Diffraction, X-Ray Photoelectron Spectroscopy, Field Emission Scanning Electron Microscopy, Atomic Force Microscope, UV-vis Absorption Spectroscopy and Water Contact Angel.The results as follows:1. CuO films were prepared at glass, quartz glass and silica by sol-gel method. The crystal structure, surface granular structure and optical properties has directly interrelated with the films'coating numbers, annealing temperature and substrates. The CuO films deposited at glass by repeating coated 3 times and utilizing two step heat-treatment show fine surface shape, and the band energy is about 2.48eV. 2. The effect of the depositing conditions, such as different sputtering gases and sputtering time for crystal structure, surface granular structure, optical properties and hydrophilicity of Cu/TiO_x composite films were investigated. The Cu/TiO_x composite films which were deposited for 1.5h at 1.0Pa in 21W power radio frequency discharges (about Cu) show fine particle and compact structures. The surface granular structure can be improved by annealing.3. With the sputtering continued, the intensity of optical absorption isincreased and red shift is occurred in the absorption edge, which is also observed when making the sputtering power larger. However, when the O₂ gas was introduced, little absorption in UV edge was found, and is adverse for the films depositing. Cu/TiO_x composite films deposited at best conditions show great hydrophilicy and the contact angles is about 20.1°. The roughness of films, annealing whether or not and Cu-O-Ti heterolinkages in Cu/TiOx interfaces may influence the hydrophilicity of Cu/TiOx composite films.