Super Smooth Surface Processing Technology For Substrate Of Crystallite Glass

The paper carries out a systematic concept of super smooth surface processing according to the requirements of crystallite glass substrate, it also mentions the solving methods of every steps for super smooth surface processing.The paper deals with the processing theory of super smooth surface. Based on researches of all kinds of methods for super smooth surface processing, two- step polishing method for super smooth surface processing on disc substrate of crystallite glass is put forward. The principle of two-step polishing is illustrated in the paper, and the double-side polishing on crystallite glass substrate is conducted with the two-step polishing method. Also, some important factors for getting super smooth surface such as the washing and testing technology are investigated in this paper. With the two-step polishing method used, surface roughness with Ra 3A on crystallite glass substrate is obtained.