Investigation Of The Glass-ceramics Used For Anodic Bonding Material In MEMS

This thesis studied transparent glass-ceramic in Li2O-AOs-SiO2 system contained Na2O with TiO2 . ZrO2 and P2O5 as nucleation agents, which was used in MEMS(microelectronic mechanical system). It adopted the conventional melt quenching technology and two-step heat-treatment system. In order to obtain proper heat-treatment, a lot of experiments were processed, including the tests of the thermal expansion coefficients, translating temperature, gradient temperature and different thermal analysis. The analysis of physics-phase composition and microstructure of glass-ceramic was made by means of XRD , TEM HRE1VL EDS SKD and so on. The influence of the chemical composition of glass-ceramic and heat-treatment on the thermal expansion coefficients, resistivity and strength was studied deeply.The results indicate: within the range of the glass composition in this thesis, the transparent glass-ceramic including Na2O could be obtained by the way of convention melt quenching technology and two-step heat-treatment ?After heat-treatment, the main crystal phase of the glass-ceramic was 3 -quarts solid solution, whose diameter was less than l00nm and volume 30-50%. The study showed: The different composition and heat-treatment could lead to the changes of the microstructure of glass-ceramic, which contributed to lead to changes of the macroscopical properties of the glass-ceramic a lot.