| Lead zirconate titanate (PZT, Pb(Zrx, Ti1-x)O3) thin film, is a piezoelectric material which is very attractive in microelectromechanical systems (MEMS) because of its high dielectric, piezoelectric and ferroelectric coefficients. PZT thin films have numerous applications ranging in microelectronics, optoelectronics, integrated optics, micromechanical system, etc. In particular, PZT thin films used in microsensors and microactuators has so high sensitive and high output strain that it will be the potential material in MEMS.In this dissertation, based on summarizing methods of preparing the piezoelectric thin films, their application and research status inside and outside, PZT thin film prepared by hydrothermal method is investigated, which covers the following four aspects:1. The special setup of hydrothermal method is investigated. Based on hydrothermal reaction condition, the setting which can stay constant temperature and circumvolve retorts has been designed and prepared to meet the request of the experiment.2. The hydrothermal synthesis method of depositing PZT thin film is studied. PZT thin films prepared by different chemical reagent, are analyzed and compared for the composition and figure by XRD and SEM. The performance of PZT thin film with TiCl4 solvent is better. The characteristics of film thickness, density, and ferroelectrics are tested and analyzed.3. The theories, Finite Element Aalysis (FEA) and experiments on PZT thin film are investigated. Theoretical model solving piezoelectric coefficient d31 of piezoelectric cantilever is analyzed. The dynamic and static characteristics of double piezoelectric cantilever are tested. The cantilever's driving ability of different thickness film is tested and analyzed. The FEA model of PZT piezoelectric microcantilevers is setup with Ansys. The response to voltage, applied on the electrodes of PZT films, is simulated. The modal frequencies of the microcantilevers are extracted with modal analysis. The results of experiment and FEA are in a good agreement, while the coherence and errors are studied as well.4. The first application of PZT thin film is investigated on the piezoelectric micropump. SODA—LIME glass, PZT thin film by hydrothermal method and PDMS plate by casting moulding are together used to equip a valveless micropump. The processes of lithography,develop and dechromisation, wet etching and masking layer removing are investigated forthe micropump fabrication.In this paper, the piezoelectric thin film prepared by hydrothermal method has good piezoelectric performance by experiments. This study for the PZT thin film is the base for film's application. |
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