Preparation Of VO₂ Films Material With Nanostructure And Research On Their Optical Properties

The windows which can change infrared radiant energy of sun with temperature of environment is called as intelligence windows or smart windows.It can adjust the energy that come into the room by automatically changing the transmittance to energy of sun.In winter,radiant ray come into the room to increase the temperature; in summer,smart windows automatically change the transmittance of radiant ray to decrease the temperature. In the development of smart windows,thermochromic VO2 thin films have been payed much attention to due to their special properties.So developed countries attach more importance to this field. The thesis concentrates on preparation of thermal-sensitive nanocrystalline vanadium oxide thin films onto the glass substrate and tests on them,introduces a method to improve the optical performance in the end. The thesis focuses on three parts: Firstly,thermal-sensitive mixed-phase vanadium oxide thin film has been prepared by ion beam sputtering and annealing in reductive ambient process onto the glass substrate.Four-point-test,SEM,HRTEM and XRD have been used to study the thin films'morphology and components.THe four-point-test shows that the films' phase transition temperature has shifted towards room temperature. Nanometer-scale VO2 grains are found under HRTEM and XRD observation. Secondly,a optical-testing equipment has been constructed.It can test the transmittance spectra of sample at different temperature very well.The transmittances measured on different temperatures also reveal that the material owns excellent switching response to infrared light at critical transition temperature.It is a basic scope to the applications of VO2 films onto smart windows. Finally, with the help of my tutor and through studying natioanl and international publications,a design of SiO2 anti-refection coating is used to improve low visible transmittance of the films, which obtains a satisfying result in experiments. Its fluence to the vanadium oxide thin film is dicussed.There is few report in this field yet.