Study Of Real-Time And Controllable Nanomachining Technology Based On AFM

Atomic Force Microscopy (AFM) not only can be used for surface detection of sample, but also for nanomachining on sample surface. AFM-based nanolithography technique is one of important methods to fabricate nanostructure such as single-electron transistor and nano-scale sample-plate. Generally speaking, AFM-based nanolithography techniques which have three processes (detection, machining and imaging) use the identical tip as machining tool and imaging tool, which makes situ-detection and control of machining result easy. However, the machining result and the veracity and reliability of detected signal are affected by the abrasion of tip. Meanwhile, it can not supply real-time signals objectively to feedback control during machining process. On the other hand, conventional machining methods achieve real-time detection and feedback control with sensors such as force sensor and grating ruler during the production, which can improve machining precision, ameliorate Surface quality of part, and boost productivity. Real-time detection and feedback control are hoped to be applied in micro/nano manipulation and machining process. Therefore, it is meaningful that combine AFM detection and conventional machining methods for the development and application of AFM-based nanolithography techniques.First, real-time and controllable nanomachining technology is proposed, based on the problem of present AFM-based nanolithography techniques such as the abrasion of tip and real-time detection, in which diamond tool is used for machining the sample and tip is used for real-time detection.To realize real-time and controllable nanomachining, a sample table sensible to tiny load and location device are added on the AFM. Aiming at the stability of AFM affected by vibration, making the judgment of the first contact of tool and sample surface difficult, a spring-damping vibration isolation device is designed and proved to be available. In addition, a feeding device of tool in liquid way is also designed torealize the precision feed of tool. The controlling of machining path of tool is performed by piezoelectric tube.In the manipulation, a locating method to realize the detection of machining object is proposed. Also the method of judging the first contact of tool and sample is discussed, and correlative experiments are done. Finally, we obtain grooves less than 10nm in depth, and achieve our primary goal.