The Survey And Token Of Micro-scale Surface

The surface of an accessory influence on its performance directly, and the development of technology calls for a more and more precise surface of a nano-accessory. For example, the surface of semi-conductor film and magnetic disc call for a RMS roughness that less than 1nm. All this requirements bring forward the thesis of nano-survey and its token. As a new kind microscope with a high resolution which based on the quantum mechanics phenomenon known as tunneling, scanning tunneling microscope(STM) is a basic tool in nano-survey, and has been widely used in surface science, biology, nano-science and so on. STM can play a powerful role in the research of nano-scale surface, so it is meaningful to conduct the research on the application of STM to surface texture survey and the token of surface texture.Taking STM IPC-205B as a tool, the research on utilizing it for nano-surface survey has been conducted and the relevant software has been developed, and the theory on the token of surface texture has been researched especially on the motif theory. The main research content of this dissertation is shown below:(1)The theory, advantage, disadvantage and application of STM are studied. The performance and the data formats of STM IPC-205B are studied, and different data processing methods are proposed for different data formats. The filter is adopted to reduce the noise of the STM data according to the characteristic of STM IPC-205B.(2)The 2-D roughness theory based on midline is studied, and the 3-D roughness theory based on mid-surface is investigated. A set of STM data is analyzed by homemade software to acquire a set of 2-D and 3-D roughness parameters, the result shows that 3-D roughness parameters are more stable than 2-D ones.(3)The 2-D motif method is studied and the research on 3-D motif is conducted. Barre′'s 3-D motif method which based on Vincent's watershed algorithm is investigated and developed, and rules for 3-D motif combination is brought forward. Finally some examples are analyzed by motif method.(4)The roughness software for STM IPC-205B with the function of acquiring 2-D roughness based on midline, 3-D roughness based on mid-surface, 2-D motif, 3-D motif and data processing is developed with Visual C++6.0.