Research On Nanofabrication With AFM In Air

Since for its advantage, such as high resolution and the ability of working in vacuum, air and liquid, one important tool of nanotechnology research - scanning probe microscope (SPM) is widely used in the field of nanotechnology. Recently, the approaches of nanofabrication using SPM have a great deal of development. Oxide based on the way of scanning probe microscope anodic oxidation has a lot of advantages, such as good insulated specialty and etch-resistant, easily operating and compatible with existing micro-electronics craftwork, all of these above make the way of anodic oxidation has a bright foreground in micro-electronics area. So this method has being attended by many research groups.Because AFM scanning tube has the disadvantages of excursion and lag, it is very difficult to achieve a high precision with itself system. In this paper, nanofabrication was realized with AFM and a three-dimension micro-displacement stage and conducting probe.In this paper, the theory of SPM electric field fabrication, the basic theory of AFM anodic oxidation and field oxidation theory of Si were analyzed. A micro-machine system was established, including atomic force microscope (AFM), a three-dimension micro-displacement stage. Micro-structures were fabricated by anodic oxidation using the conducting probe as a tool. Positive voltage in the surface of sample was send by signal access module, the probe is connected to the ground.A micro-fabrication software was developed, a friendly interactive interface was realized. Meanwhile fabrication craftwork was studied, vector fabrication of straight lines, circles and triangles and grindings, lattice fabrication of random Chinese characters were realized. The effect of bias voltage and fabrication speed were analyzed on the results of the experiments through the fabrication of straight lines. Threshold voltage and limit fabrication speed were bring forward. Finally, factors that can affect fabrication accuracy were analyzed.