Study On The Real-time Measurement Technology Of Thin Film Properties

Real-time measurement of thin film properties is a very important aspect in thin film technology. During the growing process of thin film, we need to measure several thin film properties in real time, so as to control the growing process precisely. Theoretical basis and main methods of thin film properties measurement technology is summarized, and the whole scheme of thin film multi-properties real-time measurement device is suggested, so as to research and manufacture a device which is simple in structure and can measure the growth rate , stress and refractive index of thin film during the deposition process. It can not only meet the need of experimental research, but can be applied in online measurement, so the issue of precise online measurement for the thin film properties could be solved.As to the practical work, ellipse polarization light device is designed; the improvement scheme of LD full-loop control and driving circuit is suggested and the influence factors of thin film thickness measurement precision is quantitatively analyzed; a front-set lens of detector is introduced and designed in the measurement of thin film growth rate; under current lab conditions, the interference simulation experiment for thin film growth is conducted, as to the experimental problem the solution program is given. At last, the research work is summarized and further improvement is expected.