| Recentely, MEMS uesd in the more and more field.Anodic bonding was a very important technology which used in MEMS also had many disadvantages.Following the requirement of high bonding strength, bonding materials also should be improved. Compared with traditional glass, glass-creamic had many advantages,such as high mechanics strength and rigidity. It had good chemistry and heat stability, so it can be used in many bad environment.It also had good performances in insulated . So in this dissertation, glass-creamic was chose to replace traditional glass. Wo hope the suitable composition and heat-treatment of glass-creamic which can be bonding with stainless steel and silicon can be found.In the present dissertation, Li2O-ZnO-SiO2 glass-creamic were chose for stainless steel . The structure and the appearance are studied by means of DTA,XRD and SEM and so on. The performances are studied by means of coefficient of thermal expansion(CTE) testing and bengding strength testing. The performances how to influence by the factors such as basic composition and heat- treatment system were reasearched by those teat meathods. Then the factors of voltage,temperature and time which could influence the result of anodic bonding were reasearched. At last, anodic bonding between stainless steel and glass-creamic were realized.The results indicate that:1,In the Li2O-ZnO-SiO2 glass-creamic, the main crystal phase were changed with decreasing of the Li2O content. The changing order was Li2SiO3, Li2Si2O5 and SiO2.CTE increasing from 99×10-7/℃to 140.05×10-7/℃,because of the changing of main crystal phase.At the some time,bending strength of samples decrease from 87.01MPa to 69.16MPa. Increaseing the contents of Na2O and K2O was not affect the main crystal phase greatly when the main crystal phase were fixed.But the changing increasing the CTE and decreasing bending strength of samples.2,The proper heat-treatment temperature were that nucleation temperature was between 450℃-630℃and crystallization temperature was between 670℃-760℃. The proper heat-treatment time were that nucleate nucleate time was 4.5 hour and crystallization time was 4.5hour. when we used this kind of heat-treatment system we got a good glass-creamic .It's main crystal phase was Li2SiO3 which was fixed. The micro pattern of this kind of main crystal phase was changed with increasing the heat-treatment temperature. CTE of glass-creamic changed with heat-treatment temperature and heat-treatment time as parabola.The changing of bending strength of the samples also as parabola. Samples could resist ache and alkali well. It can worked in bad environment.3,Sample E3 is the best one which can be bonded with metal.It's CTE was130.2×10-7/℃and bending strenrgth was 95.38MPa.4,when stainless steel bond with glass-creamic,the current was increased with the voltage and temperature increasing.The destory voltage of glass-creamic has a direct ratio realtionship between the surface acreage of it.The current was increased with the temperature increasing. When temperature reached 400℃,there were some area could be bonded together.In the bonding area,there was a tranition layer. It contain the element which belonged to glass-creamic and stainless.The oxidation film on the metal surface was formed at 200℃.when the temperature reached 300℃,the oxidation film coverd all the surface of metal5,when bonding time was increased,current was changed as parabola. It had high number between one hour to two hours.6,Anodic bonding between glass-creamic and stainless was realized by adjusted the parameter of experiment. The best parameter were that load was 0.58Mpa,voltage was 500V,temperature was 400℃, bonding time was one hour...
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