Synthesize And Application In Micro-fabrication Of Organic-inorganic Composite Magnetic Nanoparticles

At present micro-machine technology has developed rapidly, while micromachinedrive technology is relatively backward. Therefore, the developmentof a simple, easy-to-operate micro-machine drive mode, especially the remotecontrol drive mode is particularly crucial. Magnetic drive is a drive modewhich uses magnetic field to realize the non-contact transmission of power ormoment. In the area of macro-cosmos, it has wide application, but in the fieldof micromachine, magnetic drive research is still in the initial stage.As a new material, magnetic nanomaterials have a wide applicationperspective in the fields of aviation, electronics, information, metallurgy,chemistry, biology, medicine, environment protection and so on, because of itsunique structure and magnetic properties. Mix magnetic nanoparticles inphotoresist, through the photosensitive, photoinitiator polymerization reactioncaused by two photon absorption to eventually introduce them to themicromachine. Because of the existence of magnetic nanoparticles, this kind ofmicromachine possesses the external magnetic field controllable characteristics,so as to realize the magnetic-driven micromachine.This paper firstly introduced the special nature, synthesis methods andapplication of magnetic nanoparticles. Then it presented the development oftwo photon micro-fabrication technology and micromachine drive technology.In the second chapter, it firstly analyzed the particle nucleation, growthprinciple of the thermal decomposition method, and then introducednanoparticles surface modification and dispersion technology. In the experiment, using the iron (III) acetylacetonate(Fe(acac)3)as the precursor,oleic acid, oleylamine as the surfactant, in the 1.2-hexadecanediol existencecondition, 4nm. Fe3O4 magnetic nanoparticles were prepared with phenyl ether asthe solvent; prepare 6nm Fe3O4 magnetic nanoparticles were prepared withbenzyl ether as the solvent. Then using the seed-mediated growth method, prepare12nm-diameter Fe3O4 magnetic nanoparticles were prepared with 6nm particlesas seed. By TEM, XRD, VSM, and other means of testing, the particles'surfaceand their dispersion in organic solvents, crystal structure and magneticproperties were characterized.After that, prepare the magnetic photoresist using benzil, Irgacure369,Fe3O4 magnetic nanoparticles dissolved in BMA , PO3-TMPTA as the majorcomponents. We have got micro-spring, micro-turbine and othermicromachines by two photon absorption that can move in the magnetic field,and realize the magnetic drive of micromachine.The research in this paper integrated the magnetic nanomaterials with twophoton micro-fabrication technology, realized the magnetic drive ofmicromachine by the introduction of magnetic nanoparticles, and laid thefoundation for the development of micromachine.