Study Of Chemomechanical Producing Functional Structure On Silicon Surfaces

Since the late 1980s when nano-technology began developed, it has more and more important applications in the region of information, materials, biotechnology, microelectronics, micro-fabrication and national security, and it has become one of the most important science and technology fronts concerned by the world. With nano-technology development, design and build with a specific function and characteristics of the nano-structure assembly became very interested in the research focus. Along with electronic devices become more and more miniaturized, the demand for the nano-structure is increasing urgently, and people has carried on the widespread exploration and the research. Through this molecular self-assemble technology, and nano-materials, as a unit, can effectively build a nano - or micro-scale functional structure.In this paper the chemomechanical method was used to scribe the silicon surface in the present of aryldiazonium salt, so we can connect the silicon and the arenes with covalent bond, and realize simultaneously functionalizing and patterning silicon. This provided experiment basis for building nano-scale functional structure.(1)At first we scribe the silicon in the atmospheric, and research how could we get the micro-structure with better surface quality, and this will provide good substrate for the next functionalizing and patterning silicon.(2)we do the silicon's controlled self-assembly experiments in the solution, research the cutting speed and cutting assembly time on the department to the self-assembled monolayers'quality(SAMs), summed up more parameters suitable for the film growth.(3)Using X-ray photoelectron spectroscopy(XPS) and infrared spectroscopy to test the self-assembled monolayers and Atomic Force Microscopy(AFM)to characterize the surface morphology. Prove that this method can efficiently achieve simultaneously functionalizing and patterning silicon.(4)we connect the carbon nanotubes to the SAMs, and charatrerize the surface with AFM, this will provide experimental basis for the further study using SAMs to function silicon surface.