| Environmental pollution is a serious problem of human, and titanium dioxide is one of the most popular and promising materials as photocatalyst for air treatment and detoxification of wastewater. At present, by doping other element or compouding other semiconduct the photocatalysis property of TiO2 can be enhanced. But a few of these researches is about the photocatalytic properties during the using process, especially for the amorphous TiO2. So in this paper the photocatalytic properties during using process were studied.TiO2/WO3 films were deposited by magnetron sputtering on glass substrates. The films were characterized with X-ray diffraction (XRD), X-ray photoelectron spectroscopy (XPS) UV-Vis spectrophotometer and scanning electron microscope (SEM). The photocatalytic properties of these films were indicated by the decomposition rate of methylene blue. The effect of sputtering power, film thickness, WO3-compouding, photosource, substrate types and amount of catalyst were discussed. Furthermore, the activation, deactivation, activity regeneration of the films were also researched.The results indicated that TiO2/WO3 film exists in the form of amorphous. The results of XPS showed that Ti in the films was TiO2 structure; W in the films was simple substance and WO3; and the rate of Ti and W was 1.6:1. Photocatalytic tests showed that the photodegradation radio of WO3 flims is 56.3% and for the TiO2/WO3 flims is over 90%. At the same time, WO3 flims can not be used continously. On the other hand, for the TiO2/WO3 flims, when having been used for six times, the photodegradation ratio was still higher than 85%. After using for ten times, the TiO2/WO3 flims have no photocatalysis activity. By ultrasonic treatment the photocatalysis activity can be regenerated, after ultrasonic treatment in distilled water for 30 minutes, the photodegradation of deactivation TiO2/WO3 films reused for nine times could be resumed from 10.3% to 79.2%. The max of circle using time is seven.
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