Theoretical And Experimental Study Of Ultrasonic Polishing Vibrator Based On Rotating Traveling Wave

In recent years, ultrasonic machining technology is being developed rapidly in China. Many important technical issues has been solved and a great progress has been made, especially in the difficult processing field. This subject, which is supported by the National Science Found (Grant No. 51075195), is according to the ultrasonic vibration polishing of silicon wafers, to develop a new method due to the out-plane bending travelling wave.In this article, a new ultrasonic vibration polishing method, which is different from the plate vibrator compound mode, has been developed. This method is based on the theory of the disc out-plane bending wave and the points of its surface producing elliptic vibration. A disc-shaped ultrasonic polishing vibrator, which is relying on inverse piezoelectric effect is designed. In this article, we derives the theoretical model of particle motion on polishing vibrator's surface, and determines the polishing tool(vibrator), which is disc-shaped structure type including a holding round handle and convex tooth face. Additionally, we use ANSYS to simulate the polishing vibrator's vibration mode, and determine B0,7 out-plane bending modes of the vibrator prototype, the best diameter should be 45mm and the natural frequency of ultrasonic range are also calculated. After that, we produces two similar kinds of the polishing vibrator structures basing on the calculating results. Ultrasonic polishing vibrator's resonant frequencies, shapes and amplitude of circumferential and radial direction are tested. The results show that the two vibrators both satisfy the requirements of pre-designed, which can be used to produce B0,7 step out-plane bending modes. In these modes, it can produces uniform traveling wave.In order to study the relations between polishing pad and vibrators'interaction situation more accurately, additional containing tooth beam-shaped bending test vibrator is desinged and tested. The experimential results show that when the polishing pad are not pasted with the beam-shaped vibrator, the amplitude of each particle on its working stage are almost the same, this meets the requirements of pre-design. After pasting the two kinds of polishing pads with the ultrasonic polishing vibrators, the results show that the amplitude of the pads'surface decreased slightly, but the B0, 7 mode keeps good.