Shock Wave Aided Through-mask Electrochemical Micromachining On Titanium

Titanium is an important structural metal. With high specific strength, good corrosion resistance and other characteristics, titanium is widely used in aerospace, chemical and other fields. With the Micro Electro Mechanical System (MEMS) technology, micro-structure of titanium processed into research hotspot.Through-mask electrochemical micromachining combines with the advantages of both lithography and electrochemical machining, so it can achieve high efficiency, high-precision machining of metal micro-structure. However, it's not suitable for titanium, because titanium is apt to be passivated. This paper introduces an organic electrolyte which can solve the problem.Furthermore, the application of shock wave to electrolytic photo etching was studied in an effort to solve the problem of non-uniform erosion due to the heat and hydrogen produced in the machining process.This paper uses an organic electrolyte to conduct study of shock wave aided through-mask electrochemical micromachining on titanium. The following work has been done:1. The experimental apparatus is designed and prepared.2. Research on machining mechanism. Explore the mechanism of passivation in titanium, and masstransport depending on shock wave; a simplified electric field model is established by finite element analysis tool-ANSYS, which makes a foundation for further parameter optimization.3. In order to obtain optimal parameters, the effect of various kinds of machining parameters, including electrode spacing, electrical parameters are analyzed.4. Adopting 3mol/LH2SO4/Methanol electrolyte, conducted study of shock wave aided through-mask electrochemical micromachining on titanium. Processed into ?100μm ~ ?300μm micro-array structure.The experimental results show that: H2SO4/Methanol electrolyte can effectively inhibit passive–tion, reducing the surface roughness; shock wave can increase uniformity, surface quality and the etch rate (35μm/min) by increasing masstransport.