Micro-displacement Magnifying Mechanism Based On Piezoelectric Bimorph

With the scientific and technological development, sophisticated and ultra-precision drive mechanism in precision manufacturing, ultra-precision machining, bio-engineering, health care and chip manufacturing, more and more widely applied in many areas, the new driving method is gradually replacing the motor drive as the study the mainstream. Because of the fast response, distortion and high accuracy of piezoelectric body, it becomes the main form of constractional sophisticated constructed drive recent years. This thesis rises the design of using piezoelectric bimorph as a driver and enlarge triangle theory for the mechanism of flexible hinge displacement output as a micro-displacement amplification mechanism.First of all, the author made a clear introduction to the the classification, applications and implementations of precision drive mechanism, followed by the discussion of the basic theory of the piezoelectric-driven micro-displacement amplification mechanism design theory and the exposition of working principle of the piezoelectric actuator and the theoretical knowledge of flexible hinge.Then, this article designed the micro-displacement amplification mechanism,and made theoretical analysis and modeling of the micro-displacement amplification bodies. Through the use of finite element analysis software on the analysis of the micro-displacement amplification bodies,it found the relationship between the input and output of the body, checked out the stress of the structure, optimized the hinge of the parameters.Finally, the author produced a prototype of micro-displacement amplification mechanism and conducted laboratory tests. Through the analysis of the test results, conclusion can be made as follows: micro-displacement amplification mechanism itinerary is 0-77.8μm, whose magnification is about 6.2 times.