Research On Manufacturing Of Compound Metal-Carbon Series Electrical Idiocratic Fuctional Film

Research on carbon film is the manufacturing bases of the new carbon-materials in 21st century, and took on broad future application in the fields of farinfrared heating, electrical control and phasic control radar wave-guide components,etc. In this thesis, compound target and carbon target are made mainly by carbonized straw pole. Carbon coat electrical film was made and was tested in stability. The process of sputtering micro-wave conduct wave-guide compound metal-carbon film series on columned ferrites which used compound target was studied. Micro-wave conducting performance of film was measured, feasibility as the micro-wave conducting compound film series was proved. It is of universal and important significance in engineering and practice. Manufacturing and application of this typical of carbon electrical idiocratic functional film was the main object studied in this thesis.A vacuum carbonized furnace which manufactured to carbonize straw pole, a set of equipment which globe-grinded the carbonized straw pole were designed and prepared in this work. The furnaces were used to carbonize the smashed straw pole in the vacuum furnace first, and to grinded it in the globe-grinding machine. With the powder, woodceramics target and compound target were made to manufacture external metal-carbon wave-guide compound film series on columned ferrite surfaces. What's more, woodceramics coat electrical film were made with the carbonized powder. The results of the tests were that:Current two metal layers wave-guide film on columned ferrites was replaced by multi-function gradual films which improved the influence of rheotaxis to some extent. So the wave-guide films of ferrites were good to meet to the micro-wave conduction and driving consumption. Compound medium wave-guide film on columned Li-ferrites was made by magnetron sputtering system. Through measurement, it proved that the films which Cu-Ag film inside and compound carbon film outside were good to the require ofLi-ferrites wave-conductance entirely, what's more, wastage was less than that films series which is Cu film inside and Ti or other metal film outside. So the process and project were feasible.The process of sputtering resistance by woodceramics target was studied. The experiments proved that the film series could be used for a long time, with stability performance and could be used in farinfrared heating field.In this thesis, all the targets were made by ourselves. The materials of carbon target and several kinds of compound electrical idiocratic film were made mainly by straw pole which is of significance in environment protected and resource used repeatedly.