Structure Characterization And Properties Of Cu-Fe Thin Films Prepared By Magnetron Sputtering

Cu-Fe thin films were fabricated by a direction-current (DC) magnetron sputtering system. SiO2 buffer was deposited on the substrate Si(100). The phase structure of different Cu-Fe thin films were studied by using grazing incidence X-ray analysis (GIXA).The texture and residual stress of different Cu-Fe thin films were measured byωscan of X-ray diffraction (XRD) and 2θscan with differentω.The thicknesses of different thin films were characterized by means of small angle X-ray scattering (SAXS) technique. By using atomic force microscope (AFM) measured surface roughness of thin films.The component of different thin film was characterized by energy disperse spectrum (EDS) and X-ray fluorescence (XRF).The magnetic properties of Cu-Fe thin films were measured by means of vibrating sample magnetometer (VSM).In addition, the giant magnetoresistance (GMR) effects of different films were also measured.The original resistance of the film fabricated by a direction-current magnetron sputtering system is directly affected by bias voltage. When films were fabricated with bias voltage, the original resistances value of the films could be lower. In order to enhance GMR effect, to reduce the original resistance of the film is significant.After vaccum annealling in magnetic fileld, the films were studied by grazing incidence X-ray diffraction analysis andωscan of X-ray diffraction. The results showed that Fe atoms could be separated from Cu matrix, which results in the increasing of the interface scattering, and enhance GMR effect.AFM measurement indicates that the surface roughness of films is different with difference of Fe content, and the films all represent self-assembly phenomenon.The results of the magnetic properties measurement reveal that in the assputtered films, the more Fe content in the film, the higher the magnetic properties of the film.The results of GMR testing indicate that the GMR effect is much little in the assputtered films, but they will be enhanced after vaccum annealling in magnetic fileld. And we also found that the thickness of the films and the...