Study Of Noncontact Testing Technology For Glass Lenses With Multi-Surface Profile Measuring System

With a wide range of applications of the glass in the electronicsand semiconductor silicon substrates, the performance of the glassproposes higher requirements, especially for the appearance of the glasssurface, the thickness and other index. Therefore, we need to do precisetesting for the glass surface. And in the recent detection methods, thefrequency scanning interferometry (Frequency Scanning Interferometry,FSI) is the major testing method.Here used the testing methods of FlatMaster MSP(Multi-Surface Profile, MSP) system initiated by Corning, the surface isquickly measured, the analysison the variety of continuous surfaces anddiscontinuous surfaces (engraving, embossing, etc.) of theappearance ofthe glass material surface,and the improvement of the control andtechnology in the processing glassis also processed.Here I plan to complete the following tasks:1) Study the design structure and measuring principle of MSP.2) Compile the MSP testing procedures for the appearanceofdiameter200mm anddiameter300mm hollow Wafer window films,glass screens and other products, and validate the reliability of testing.3) By means of MSP measurement testing, it comes true themeasurement for Eagle XG raw glass material of surface shape, thicknessand TTV segmentation, a large measurement data after cutting the glass,and the control on the appearance of the incoming material by the MSPon the large combined raw materials.4) By means of MSP, it can directly come true the classificationand recording the time of grinding and buffing of Wafer raw material, soas to actually improve the quality and efficiency of the products.