| With the development of science and technology, aspheric optical parts isused more and more widely in military, aerospace, medical and other fields,which is closely related to people’s life. Due to the traditional machining methodis difficult to meet accuracy requirement, some microstructure surfacemanufacturing technology developed recently also has limitation. However,ultra-precision turning has many advantages to process microstructure comparedwith the methods above, such as machining asymmetric spherical and the surfaceroughness of part can reach nanoscale, etc. Therefore, single point diamondturning is more and more important to process microstructure.The drive system of ultra-precision turning is chosen as research object ofthis topic, which is composed by piezoelectric ceramic actuator and flexure hingesteering mechanism. The mechanical properties is decided by the flexible hingetool and the accuracy is decided by piezoelectric ceramic actuator. Therefore, thetwo part is focus of research, the main research contents include:Analyzes the mechanical performance parameters of the flexure hinge toolslide, such as stiffness and modal of flexure hinge.The flexible hinge headstructure is optimized with ANSYS soft. Choose the appropriate structureparameters, then to complete the design of structure. Compared the simulationresults with the theoretical calculation results, verifies the correctness of thesimulation results.Through the study of the nonlinear hysteretic characteristics of thepiezoelectric ceramic, to chosen a method based on the Preisach model tocompensate, the model established by this method is used as the feedforward partof piezoelectric ceramic control, which is used to improve the positionaIaccuracy.Due to the change of depth in the process of cutting and materialnon-uniform, this will produce a disturbing force, which will effects onmachining quality. Using the sliding mode to reduce the impact of externaldisturbances on the processing.The result of simulation shows that the algorithmis feasible and efficient. |