Research Of The Nanowire-arrays For Micro Thermoelectric Generator

The micro thermoelectric power generator based on the Seebeck effect areadaptable to application needs in the fields of microsystem device, integrated circuitchip, bioengineering system, and so on, as they are free of external devicesandmoving parts and the waste heat can be recovered. The subjects ofthermoelectricity has received concerns persistently in the past severaldecades.However, due to their performance and over-low efficiency, the thermoelectricmaterials always fail to meet the requirements of the practicalapplications. In recentyears, with the huge improvement of MEMS technology and the deep research of lowdimension, microscopic modulation and other promoting measures for thermoelectricmaterials, performance of thermoelectric materials and devices have been providedwith new breakthrough. In this paper, preparation and integration of the Bi-Te seriesthermoelectric nanowires have been studied, and an optimization experiment has beencarried out on the manufacture techniques of micro thermoelectric power generationelements.Bismuth telluride films depositioned on the titanium substrate has been studiedfirstly, and experiments have been conducted in the three-phase two-electrode circuitelectrolytic tank, and the stable-phase chemical compound film with the Bi2Te3hasbeen obtained by changing the solution concentration and the deposition voltageaccording to the electrochemical theory. Based on the film deposition, the targetdeposition voltage has been got in the established solution proportioning, with themethod of cyclic voltammetry.The bismuth telluride nanowires with the diameters of25nm have been produced. Revealed by the results of XRD (X-ray diffractometer)and EDS (energy dispersive spectrometer), the single-phase Bi2Te3chemicalcompound has been got by deposition in nanopores of porous anodized aluminum. Ithas been observed from SEM (scanning electron microscope) that the depositionconstituents are nanowires with the same nanopore diameter.In this paper, gold electrode patterning on the AAO template surface has beenrealized through electronic beam evaporation and lithography, and production of theelectrode microcell with the hard mask method has been studied. The smallest wire is30μm wide. The method is characterized by its high efficiency, convenience andrepeated use of the hard mask. Parameters of AAO surface lithography have been studied, and the surface secondary mask formed by the photoresist SUN-1150P hasbeen used for the microcell nanowire deposition. Experimental parameters ofelectrochemical deposition with the i-t curve have been studied to get the completenaowire array.Technical connection between upper and lower surfacehasbeen implemented through twice lithography of double-side alignment, so as tocomplete the whole technical process of power generator manufacture.In addition,anoutlook is put forward to plan the subsequent project and work.