Dc Glow Discharge Ionization Pic / Mcc Simulation

Technique of glow discharge is extensively used in surface modification, film fabrication, etching and so on. The characteristics of charged particles are attracting considerable attentions in these applications. In contrast to the investigations of the steady-state of direct current glow plasma, the characteristics of ionization progress in direct current glow discharge is less studied. The research on the ionization process of direct current glow discharge is meaningful for the more accurate simulation accords with the real physical evolution process and more detailed microcosmic and transient state results can be obtained, which accords with the real physical evolution process and gives more detailed microcosmic and transient state results. And the whole discharge region can be included in the simulation, and more comprehensive descriptions for the direct current glow discharge can be obtained.The major achievements are listed as the following:(1)Particle, fluid, and hybrid models are focused on the theoretical and computer simulation of the direct current glow discharge and direct current glow discharge plasma. In this paper, these three models are reviewed, summarized, and contrasted respectively. The future research and development is viewed. It is important to study the ionization of the direct current glow discharge. And the particle-in-cell plus Monte Carlo collision method in particle model is preponderant in the simulation of the direct current glow discharge and direct current glow discharge plasma.(2)A theoretical model has been proposed to study the ionization characteristics of the direct current glow discharge of argon. The plasma collective motion, collisions between particles, the interaction between the charged particles and the boundary are taken into account. The elastic, excitation, ionizing electron-neutral collisions and elastic, charge exchange ion-neutral collisions are included. The cross sections are the functions of particle's energy. And the secondary electron emission model has been developed to simulate the behavior of the ion which comes to the boundary in the progress of discharge.(3)A three-dimensional particle-in-cell plus Monte Carlo collision (PIC/MCC) method is used. The simulation code is the original work. The FDM method is used to calculate the electric fields. The interaction between the charged particles and electric fields are described by particle-in-cell method. The collision processes and the behavior of charged particle which reach the boundary are treated with Monte Carlo method. And the advantages both PIC to plasma collective and MCC to collisions are obtained.(4)The detailed microscopic information about the distributions of charged particles and electric fields from the initial stage to the steady state of direct current discharge are obtained, and the spatio-temporal evolution of the movements of charged particles are shown. The detailed information about the distributions of charged particles, the velocity, the energy and the electric fields are obtained and analyzed. The results can explain the ionization characteristics of direct current glow discharge plasma well.