Based On The Analysis Of The Process Of Mos Excel Electron Beam Steaming Aluminum Improvements

I made a detailed study about electron beam evaporation system in this graduation thesis, and made a comprehensive analysis on impact of electron beam evaporation and the five major factors include aluminum source crucible, baking temperature, high voltage supply and vacuum. Based on analyzing the basic theories, respectively to make pivotal contrastive experiments. Application of the experimental data analysis and graphics MSO EXCEL obtained after drawing from the visual point of view of comparing the optimal plan.The result of the experimental method used to optimize. Firstly I made experiments on one of the factor, that make comparative experiments had good conditions for the second factor will be the prerequisite for the experiment, and so on, thus obtained for the workshop the best equipment hardware and process conditions. And the conclusion is that we must use imported aluminum source as evaporation source; with Telemark 258 Electron Bean Gun 258-type evaporation source crucible as a carrier; baking temperature is about to meet in the 200℃;-10KV high voltage application of the high-voltage supply, in achieving these four conditions, the most important conditions for the vacuum and then to 7.0×10-7TORR above, the aluminum layer of quality, including density (corrosion time), consistency (sheet resistance) to achieve the best results.