Synthesis Of Large Area High Quality Graphene Film By Chemical Vapor Deposition

Graphene, a monolayer of carbon atoms arranged in hexagonal lattices, has been the focus of both fundamental and applied scientific researches. Exceptional physical properties, including integer and fractional quantum Hall effects have been demonstrated. Graphene also shows a wide range of promising applications such as in transistors and transparent electrodes. However, graphene produced by the initial exfoliation method is limited by the small size and low yield. Many efforts have been devoted to developing diverse approaches recently, aiming for large-area synthesis of high quality graphene films. Among them, chemical vapor deposition (CVD) from gaseous carbon sources, mainly methane on catalytic metal substrates (such as Ni and Cu) has already shown great promise. However existing CVD graphene growth technique still has many shortcomings, making it incompatible to contemporary industrial semiconductor technologySynthesis procedures of large area, few-layered graphene are discussed in this article, especially the temperature dependence of the quality of the sample. Also we suggested an possible explanation of these phenomena.The First Chapter presents a Brief historical review of the research of Graphene. A review of the history of CVD synthesis of graphene is also included, intending to lead a better understanding of the problem that encountered now.As a standard to determine the quality of the sample, the characteristic physical properties of graphene has to be mentioned. Thus we used basic solid state physics to derive and elucidate those properties and some key character of graphene. The novel transport properties of electrons inside graphene are also reviewed briefly.Chapter 4 mainly demonstrates our fabrication procedure of graphene. Through the analysis of obtained characterization data, the quality of fabricated sample proved to be satisfying. Besides we investigate many dependence of many factors with the quality of sample Then, according to the short coming of these methods, we made some modification of these samples. We employed solid and liquid carbon source, such as Poly(methyl methacrylate)(PMMA), Polystyrene, and benzene as the carbon source and fabricated graphene film at lower temperature, providing an alternative route to fabricate graphene via CVD measure.The last chapter summarizes the main topics of this article, and prospects the future research of graphene to draw a conclusion.