| In recent years, with the development of microelectronics technology, people more and more demand for nano materials. Today nano techno logy research has not only confined to the study of basic physical and chemical properties of nanomaterials, more is the preparation of some unique nano structures, using the different mechanical, electrical and optical properties and unique nanostructures to build all kinds of nano electronic devices and optoelectronic devices, and they are applied to areas such as biological medicine, information technology, bringing great convenience to our life. Zinc oxide not only has the properties such as semiconductor and optical excitation, as the material of wurtzite structure it has piezoelectric properties. Because the nanowires have more excellent mechanical properties than film, zinc oxide nanowires are often used to study piezoelectric properties, and they are important materials for the preparation of piezoelectric nano generator. Combining its natural piezoelectric properties and helical structures of nanocoils, zinc oxide nanocoils may have better piezoelectric properties.There are many methods for the synthesis of zinc oxide nanostructures, in which liquid phase method and magnetron sputtering are the most commonly used. However, magnetron sputtering is commonly used to obtain zinc oxide film, being difficult to prepare nanocoils. This paper is trying to prepare zinc oxide nanocoils by template method. Carbon nanocoils by chemical vapor deposition(CVD) are used as the template, and then a layer of zinc oxide crystal on the surfaces of carbon nanocoils is formed using magnetron sputtering. At last, carbon structures are burned at high temperature, leaving pure zinc oxide nanocoils.Zinc oxide nanowires have better piezoelectric properties than thin film materials. They can be used for piezoelectric electronics and piezophotonic electronics devices, and they are also excellent material for nano generator. Therefore, nanowires or nanorods are usually studied for piezoelectric properties of zinc oxide nanostructures. But the voltage of piezoelectric nano generator formed by zinc oxide nanowires can only be mV magnitude, and the power generation efficiency is low. In this thesis, the piezoelectric properties of zinc oxide nano coils are studied. Strain and potential distribution of zinc oxide nano structures in deformation is simulated by Comsol Multiphysics software which analyze problems about multiple physical fields. Through the analysis, when tensile deformation occurred on zinc oxide spiral structures, the inner and outer surfaces will have a potential difference. And each part of the spiral surface has different potential due to different deformation. In a pitch, the potential distribution is not uniform, and in the spiral structural, the potential distribution changed periodically. |