Effects Of Interlayer On The Adhesion Strength Of PET-based SiO₂ Film

The design ideas of the interlayer of PET-based Si O2 films are proposed according to PET-Si O2 films characteristics. PET-based Si O2 films are prepared using magnetron sputtering technology. The influences of materials, number of layers, depositing parameters and post-processing of interlayer on the adhesion strength of PET-based Si O2 are studied systematically.PET-based Si O2 films with different interlayers are deposited by magnetron sputtering. The influences of materials and number of layers of interlayer on its adhesion strength are studied. Results show that Si O2/PET composite film with Mg O interlayer has the highest adhesion strength, which is 82% higher than that without interlayer, while Ti O2 and Al2O3 interlayers increase adhesion strength by 65% and 73%, respectively. In addition, the film’s adhesion strength with double interlayers is raised by 4.58%~ 12.89% than that with single interlayer.The effects of Mg O interlayer’s preparing parameters on the adhesion strength of Si O2/Mg O/PET composite films are investigated. Results show that the adhesion strength increases with the increase of vacuum degree, but firstly increases and then decreases with the increase of sputtering time, radio-frequency power and argon flow. The influence degree of preparing parameters on the adhesion strength is vacuum degree, radio-frequency power, argon flow and sputtering time. Under the parameters that vacuum degree of 0.5×10-3Pa, radio-frequency power of 250 W, argon flow of 20 m L·min-1 and sputtering time of 12 min, the composite films have the largest adhesion strength.The effects of Mg O interlayer’s post-processing parameters on the adhesion strength of Si O2/Mg O/PET composite films are also investigated. Results show that the film’s adhesion strength is increased by 25.6% through interlayer’s post-process. The adhesion strength increases with the increase of vacuum degree and sputtering time, but firstly increases and then decreases with the increase of radio-frequency power and argon flow. In the four post-processing parameters, radiofrequency power has the greatest effect on the adhesion strength, followed by vacuum degree, sputtering time and argon flow. The optimal post-processing parameters are radio-frequency power of 60 W, vacuum degree of 0.5×10-3Pa, sputtering time of 300 s and argon flow of 15 m L·min-1.