2 </ Sub>-of Tio, Of Sno <sub> <sub> 2 </ Sub> Nano-powders And Thin Films Of The Composite System And Humidity Sensing Characteristics Of Study

Humidity-sensitive elements based on SnO2-TiO2 ceramic thin films have been prepared by the sol-gel technique. The microstrcture of the films and the humidity-sensing properties of the elements have been studied. A series of SnO2-TiO2 thin films were prepared by spin-coating of sol precursor solution on Ag- Pd covered Al2O3 substrates. By testing the relation of resistance and relatively humidity and measuring other performance parameters, showed sensor has the good humidity sensitivity. Finally, the paper discussed the probable humidity sensitivitymechanism of alkali metal ion doped SnO2-TiO2 thin films.