Structure And Properties Of Magnetron Sputtering Dlc ​​films

The Diamond-like carbon film (DLC film) has been applied to mechanism, electron and optics fileds because of its high hardness, high transmittance, strong chemistry inertia, good biocompatibility, good performance in anti-wear ability, thermal conductivity, insulation and so on. Compared with the diamond film, the preparation of the DLC film has the advantage of simply equipment, low preparation cost, higher depositing rate etc.. So it's value to research it.In this paper the high pure graphite piece was taken as the target material, using unbalanced magnetic controlling sputtering method to prepare the DLC film. The reason why the crimple appear in the DLC film on the glass substrate was studied. From the angle of enhancing the film-matrix binding force, the influence of the supersonic cleanning to the film-group binding force was studied.In order to compare with the glass substrate, Ni, Mo, Si was selected as the substrate to prepare the DLC film. The structure of the film was analyzed by the Raman spectrum. The film-matrix binding force and direct current conductivity of different substrate were compared. The film-matrix binding force of glass substrate and DLC film was worst and not suitable to form the film directly, yet DLC film adhered quite well in other three kinds of substrates. The film which was prepared in the Ni substrate contained many sp2 hybridization carbon atoms, thus its conductivity is good.In order to strengthen the film-matrix binding force, Ni transitional layer was first deposit on the glass substrate using the electron beam deposition method, then continue to deposit the DLC film on the transitional layer using unbalanced magnetic controlling sputtering method, thus the Ni/DLC compound film was prepared. The film structure and the property were detected by the scanning electricity microscopy, Raman spectrum and the digital multitester. The result indicated that the thin film surface was smooth, compact, had the Raman spectrum characteristic of DLC film and good electrical property.