The Thermal Response Properties Of Metal-dielectric Multi-layer Thin Film Induced By Femtosecond Laser

In recent years, the miniaturization of divices have drived a rapid development of the semiconductor and microelectronics technology, the design and manufacture of the device has entered the micro/nano-scale. Since quantum effects and the large surface and interface effects, the reserch of a discipline on microscale have been in need. The microscale thermal properties have a significant size effect, the device's thermal properties are of concern. The purpose of this research is to discuss basic thermal properties for the thermoelectric devices design. As the metal, dielectric and other films are very important component of microelectronic devices, its thermal properties play an important role on the of stability and reliability of microelectronic devices. With wide application of the ultra-short pulse laser heating in the film production and heat treatment, studying the thermal response properties of thin gold/dielectric film heating by ultra-short pulse laser is of great significance.This research starts from the energy conservation equation and the Boltzmann transport equation, build a hyperbolic two-step heat conduction model which is used to discribe the thermal response properties in micro-scale. Using this model, the single layer thin metal(Au) films on ultra-fast heat transport phenomena was simulated, obtained a similar result compared to the results of previous scholars'work, and then generalized this model to the dielectric thin films, which is used more than the gold film in engineering applications, some structures, such as the metal/dielectric single/multi-layer thin films'microscale thermal response properties were simulated.Metal have a stronger nonliner effects compared to other materials. However, these nonlinear effects are not easy to observed, because of their high reflection, and the light which are not reflected was mostly absorbed by metal materials. So we need to build some special structure to observe metal's nonlinear effects, and the bulk metal cannot be used. Recently, some structures such as the mental-dielectric photonic band-gap which contains a series of metal films have absorbed lots of researchers'attention because of those structure's non-linear effects. Incident light can penetrate the metal film because of these anit-reflective structure, so we can observed the non-linear effect straight. The last chapter of this paper will research the use of micro-scale thermal transport model in induced transmission filter (ITF) structures, and discuss the influence of ITF on nonlinear effects of metal films.