Manufacturing Technology And Application Of Zr-based Amorphous Alloy Mold

Using bulk amorphous alloy in a broader supercooled liquid region with superplasticityperformance to manufacture micrometer or nanometer level molding is one of the hotspotsof the current bulk amorphous alloy application. At the same time, bulk amorphous alloybecause of its unique structure has higher strength, wear resistance and corrosionresistance, met to the requirement of repeating batch production plastic parts with complexand precision superfine structure, is the ideal material of manufacturing precisionmicro-mould. At present, bulk amorphous alloy has been used in the micro manufacturingarea, such as micro/nano-level components （micro gear, micro spring, micro IC probe, etc）,high-density storage device, coherent optical components, miniature mould and miniaturesensors. So the amorphous alloy mould, oriented to micro-fluidic chips, has great practicalsignificance by hot embossing and transfer process.The main work of this project is to develop a bulk amorphous alloy micro-mould. Firstof all, cavity mould of micro-channels is etched on silicon slice. Second, amorphous alloyprecision micro-mould is got with a broader supercooled liquid region of amorphous alloyby hot-embossing. The last, polymer micro-channels with pattern are manufactured byhot-embossing and transferring. So the polymeric micro-channels is achieved by hotembossing and transfer process, and the work is expected to form a set of repeating batchproduction technology by hot embossing and transfer process.The hot-embossing simulation of amorphous alloy is to getting the observation of thestress changes, strain changes and the filling material changes of amorphous alloy byhot-embossing process and guiding the actual hot-embossing process. Stress and strainmainly concentrate in the right angle place near the channels. The result of molding isdifferent. The first forming structure is disk structure, the second forming structure arebend channels and straight channels, the third forming structure are long straight channelsand right angle channels, the last is trigeminal120°channels.The influence of hot-embossing temperature, hot-embossing rate and hot-embossingstress on amorphous alloy mould by hot embossing is researched. Determining thereasonable parameters of amorphous alloy mould by hot embossing is needed. And thebulk Zr₄₈Cu₄₅Al₇amorphous alloy mould manufacturing process is our ultimate aim. Different parameters have different results. The parameter of470℃（hot-embossingtemperature）,5×10^-3mm/min（hot-embossing rate） and3600N（hot-embossing stress） isthe best one. The problems emerged in the forming process are listed, such as amorphoussurface oxidation, part of filling. And causes of the problems are analyzed and problemsare solved, combined with simulation and experiments.The influence of hot-embossing temperature, hot-embossing rate, hot-embossingstress and hot-embossing time on polymer by amorphous alloy mould with hot embossingand transfer process is researched. Determining the reasonable parameters of polymer byamorphous alloy mould with hot embossing and transfer process is needed. And thepolymer （PMMA） channels manufacturing process is our ultimate aim. Differentparameters have different results. The parameter of145℃（hot-embossing temperature）,1.5×10^-2mm/s（hot-embossing rate）,90s （hot-embossing time） and3000N（hot-embossingstress） is the best one. And the experimental results show that the second method（sandwich structure: amorphous alloy, polymer and concave die） is better, hot-embossingstress is most important factor; hot-embossing temperature is the second one;hot-embossing time is the third one and hot-embossing rate is the last one.