Optical Thin Film Thickness And Performance Test

In measuring of optical parameters of thin film, the thickness of optical film is one of the key parameters in thin film design and preparation process. In preparation of high extinction ratios polarizing beam splitters, if there is no reliable test method and jig for test results, it can be obstacle to the polarization of the high performance beam splitters development and production. Since21Century, glancing angle deposition technique has been an effective methods to obtain best birefringence. According to the optical properties and optical constant test of different incident Angle sculpture film, we can obtain the relationship between its anisotropy and the incident Angles, which in turn guides and improves functional sculpture film preparation process. Consequently, this kind of research method has important influence on the development and promotion of glancing angle deposition technique. This paper is to deeply research on the optical film thickness and performance testing from the aspect of both theory and practice.In this paper, contact-profilometer, white light interference profile meter, spectrophotometer and elliptical polarization instrument are used in the accurate measurement of thin film thickness. On the basis of tests, the paper Make comparisons on the results of the four different measurement methods by error analysis, and evaluate that whether there are systematic error. Base on the above, it concludes the four instruments in the advantages and disadvantages in the process of measurement.Combined with previous practice experience, the paper also introduces the polarization spectral prism of coating and assembly process. And then it provides the design that matching with Lambda950spectrophotometer, which can contribute to the quick and accurate measurement of the spectral performance of prism polarization beam splitters in the production line.Based on test of sculpture film polarization property, the paper finally analyze the relationship between sedimentary Angle and in-plane birefringence, and then lead to the result of best deposition Angle to produce the titanium dioxide sculpture film.