Research And Expeirment Of Multidimensional Micro Force Sensor Used For Indentation/Scratch Test

With the in-depth research of various materials，Material fatigue wear propertiesand friction performance parameters should be determined besides the stiffness of amaterial modulus of elasticity creep and parameters such as fracture toughness. Theseparameters could be ensured by indentation/scratch experiment, so it has importantpractical significance to develop a multidimensional micro force sensor that could beused in material scratch experiments. This paper focuses on multidimensional microforce sensor design and experimental analysis, According to related subjects,two-dimension micro force sensor and three-dimension micro force sensor aredeveloped. Meanwhile, various performance parameters of these two sensors aremeasured. And relevant indentation/scratch experiments are made.Firstly, this paper introduce the domestic and foreign research progress and themain application fields of existing multidimensional force sensor, according to thedomestic and foreign research progress, research programme of multidimensionalmicro force sensor used in indentation/scratch experiment is determined, at the sametime, according to the performance characteristics of various multidimensional sensor,it could sums up which structure of the sensor should be used. Combining with abovetwo factors, it could determine multidimensional sensor’s design scheme.Secondly, this paper analyses strain type multidimensional sensor’ workingprinciple and sensor flexure hinge classification and operating characteristic, Andcompliance calculation formula of straight round type flexure hinge is deduced, it willbe the major rationale to elastomer design, then this paper introduces some importantparameters of multidimensional sensor and explains decoupling matrix and decouplingformula of universal expression.Then, Using the mature single cantilever beam weighing sensor, a two-dimensionmicro force sensor is designed and single directional loading experiment is made bythis sensor, And the resolution of the sensor, sensitivity, return error and coupling property are determined. This paper also makes different angles force loadingexperiments, contrasts the experimental results and theoretical calculation results andanalysis error source. At the same time the material indentation/scratch test device is setup, and scratch experiments are made by this sensor, In the experiments process,different forces are loaded in positive and negative polishing surface of single crystalsilicon slice, Through the contrast test data the relevant conclusions are drew.Finally, for three-dimension force sensor, this paper makes the structure designand key parts size design, and optimize the structure by ABAQUS, through that first tofourth order frequency could be determined, then, the sensitivity of the sensor and otherparameters are determined by experiments. This paper also deduces decoupling matrix,which is suitable for three-dimension force sensors. Then through themulti-dimensional loading experiment, it proves the validity of decoupling matrix.Then, the indentation/scratch tests are made by three-dimension force sensor, and theresults are consistent with the two-dimension force sensor. At last, the similarities anddifferences between the two sensors are compared, It could be known that withimproving sensor measurement dimensions, resolution reduction and coupling degreeincrease will emerge.