The Measurement Method Of Multi Degreee Freedom Motion Error Based On The Optical Wedge Attitude Fringe Analysis

The high-precision, high-resolution, automated measurement has a very importanteffect in the field of precision measurement, product manufacturing, navigation,high-precision, high-resolution, automated measurement. This article research microangle, micro displacement and straightness, angular deflection. Based on the Michelsoninterferometer principle, design a multiple freedom measurement system combined withstripes shape. Corresponding theoretical model, hardware circuits and softwarealgorithm is proposed, the main research contents as following:Firstly, with Michelson interference principle, design a laser interferometermeasurement system. From the laser collimating characteristics and the design of theoptical path give some analysis; with two states of static and dynamic, the theoreticalrelationship model between the beam, the optical path and the optical wedge posture ismodeled; explore improvements in avoiding the return beam direction of theinterference system is proposed.Secondly, the study of the method of receiving and processing of the light intensitysignal in the laser interferometer system, good or bad signal processing often determinethe level of measurement precision. The combination of the used CCD identificationmethods, analysis of a photo-detector processing advantages and disadvantages is gave,and highlights the Tian-shaped and circular four-quadrant photo-detector different phasecalculation method, using matlab software gives the simulation analysis. Finally, therelational model between the striped shape and the beam angle is molded, and completerelational model between the workbench angle changes and stripes shape.Thirdly, the overall embodiment of the interference system is elaborated andachieves the driver, the signal reception process and the interface display process.Designed PZT hardware driver circuit and a four-quadrant photoelectric conversioncircuit to achieve a dynamic stripes modulation and signal extraction; analysis systemnon-synchronization among the driver and the sampling process, and design thecorresponding processing techniques; In the aspects of the data processing thecorresponding filter algorithm is used; ellipse fitting algorithm is applied in therecognition processing of phase differ in four quadrants, and the sensitive identificationalgorithm is designed to recognize stripe shape, adn complete the identification of theworkbench of the2deflection angle range.Finally, through experimental sampling, the measuring instrument ELCOMAT3000with advanced angle axis electronic self-synchronization collimator is used forcomparative experiments on the measurement data, the error analysis and errorcompensation is realized to verify feasible of the interferometric measurement systemand can realize the angle partial and line partial measurements.