Research On The Grinding Process Of Micro Single Crystal Diamond Tools

The micro manufacturing is an important part of ultra precision machining.In micro fabrication, due to the small processing parameters, traditional processing of ultra precision grinding can not be applied to micro manufacturing. By using the single crystal diamond cutter, the smooth surface can be cutted out directly with good work quality and high processing efficiency. In the micro manufacturing, carbide cutting tools and polycrystalline diamond tool has been widely used, but the study of single crystal diamond micro cutting toos still had no progress.In this paper,single crystal diamond micro cutting tools were as the research object and different millstones and microscopes were used to ensure the material removal rate and the blade quality at the same time.The main research contents are as follows:(1)In the experiment, tools were grinded by the traditional ordinary grinder which has a resolution of 1μm. The reasonable abrasive particle size, grinding speed and feed rate were determined.(2)After mechanical grinding,the tool edge radius were more than 3μμm. By means of scanning electron microscope observations, brittle removal and fatigue cleavage were the mainly material remove style of single crystal diamond. Through the contrast tests of abrasive, more complete surface and edge of few chipping phenomenon were got when the single crystal diamond was grinded with abrasive. Here comes the conclusion: single crystal diamond micro tool grinding should be carried out in the state of adding abrasive.(3)In order to seek a better material removal mode, the copper, iron plate, copper based tungsten carbide disc and aluminum silicon carbide disc grinding test were compared. Because of the large margin, the integrity of the material can not be guaranteed when the copper and iron disc were used. Copper based tungsten carbide disc and aluminum silicon carbide plate can get better cutter quality. Copper based tungsten carbide disc obtain better edge quality in sharpening by promoting oxidative reaction of single crystal diamond.(4)Micro single crystal diamond cutting tool was made,which was grinded by the copper based tungsten carbide millstone, with the intact edge when magnified 5000 times and the profile of 0.1μm. The machined surface roughness of the aluminum material bar cutted by the tool was Ra42 nm.