Preparation And Reserach Of SnO₂:F Thin Films And Composite Films By CVD Method

Because of the excellent conductivity and light transmission capability of the transparent conductive film, which is widely applied in the area of photovoltaic modules, energy saving window and so on. Wherein the SnO2"F (FTO) films were widely researched in the field of film as its low cost, high performance, and simple and efficient preparation process equipment.In this paper, the high transmission FTO films, high haze FTO films and shading Low-Emissivity FTO/ATO composite films were deposited on glass substrates by atmospheric pressure CVD method respectively, by means of the on-line coating experiment equipment, and the principle and performance of FTO films were analyzed.First, the new liquid DMTC was used as the precursor to coat high transmission FTO films on borosilicate glass substrate, and the impact of different amounts of water as catalyst, the ratio of dopant and the total flow of raw materials on the optical and other properties of the FTO films were researched, Finally, the high performance FTO films were prepared with a sheet resistance of 9.2Ω/□, transmittance of 84.17%. It showed that all the films were rutile structure of SnO2 thin films, having good crystallinity, uniform surface, larger grains and less grain boundary.Second, the film glasses used for Solar cell had to meet the requirements of high conductivity, high transmittance and high haze simultaneously, but they were always difficult because of the interact of them. Therefore, in order to solve the problem of high haze, high conductivity and high transmission, In this paper, the mechanism of and influence factors of haze were studied, then the series of thin films with different haze were prepared by changing the ratio of H2O/Sn, Finally, The film with the thickness of 1090nm prepared at the molar ratio of H2O/MBTC of 1.5 had a visible light transmittance of 76.8%, a sheet resistance of only 3.2Ω/□ and a high haze of 14.3%, the process is simple and low cost, it had solved the problem of the interaction between haze and transmittance.Third, the building windows used for temperate regions, both need some indoor lighting performance to ensure adequate light to avoid damp, dark, and also need the function of partial shade and reflecting infrared radiation, to reduce energy consumption. Therefore, in this article, the FTO/ATO composite films ware prepared with a certain lighting performance, a low shading coefficient and emissivity and a high reflecting infrared, then the impact of the top FTO film with different thickness on the properties of the composite film and complex mechanismswere were studied.