The Study Of Microstructure And Property Of CrN Coating By Arc Ion Plating

In this paper,the CrN_x thin films were prepared on M2 high speed steel and 316 L stainless steel substrate by arc ion plating techniques.The samples were analyzed by X ray diffraction?XRD?,scanning electron microscopy?SEM?,transmission electron microscopy?TEM?and friction and wear testing machine,The influence of vacuum chamber pressure and argon/nitrogen ratio on the microstructure,chemical compositions,microhardness and wear resistance of the CrN_x thin films were investigated.The results show that the increase of the nitrogen gas pressure has a significant effect on the surface morphology of the CrN_x films deposited on M2 high speed steel.With the increase of nitrogen pressure,the number of large particles decreases and the size decreases;With the increase of nitrogen pressure,the phase of the film was changed from Cr+Cr₂N to Cr₂N+CrN mixed phase,and the preferred orientation of the films was Cr₂N?300?,and the CrN single phase film was not founded in the experiment.The CrN_x film was deposited on M2 high speed steel,with the increase of nitrogen pressure,the microhardness of the films was greatly improved,and the maximum of 2237kg/mm2 was achieved.With the increase of nitrogen pressure,the friction coefficient of the films was decreased,and the friction coefficient of the films was the smallest when the pressure was 4.0Pa.The CrN_x film deposited on 316 L stainless steel,the increase of nitrogen gas pressure on the surface morphology of the film have a major impact: with the increase of nitrogen pressure,the number of large particles decreases and the size decreases and the film surface is more smooth;with the increase of nitrogen pressure,the film is mixed with Cr₂N+CrN phase,the preferred orientation of the films is Cr₂N?300?,the single CrN film is not found.The CrN_x thin films were deposited on M2 high speed steel,the ratio of argon / nitrogen has great influence on the surface morphology of the films.With the increase of argon / nitrogen ratio,the number of large particles increases,the size is larger,and the surface roughness of the films is rough;The phase composition of the films was affected by the ratio of argon / nitrogen.The Cr?Cr₂N and CrN phases were observed in the experimental process.The film was changed from Cr₂N+CrN to Cr₂N+Cr when the radio is from 0 to 40%,and the preferred orientation of the films was Cr₂N?300?,and the CrN single phase was not founded in the experiment.On the M2 high speed steel,the film was deposited,and the ratio of argon / nitrogen affected the microhardness of the films: with the increase of argon / nitrogen ratio,the microhardness of the films decreased and then increased and then decreased.When the ratio of argon and nitrogen was 25%,the minimum value was 1776.1kg/mm2,the ratio of argon and nitrogen was 40%,and the maximum was 2263kg/mm2.On 316 L stainless steel,the CrN_x film was deposited,argon /nitrogen ratio has a great influence on the surface morphology of the films.With the increase of argon / nitrogen ratio,the number of large particles increases,the size becomes larger,the surface roughness of the films is rough,and with the increase of the ratio of argon / nitrogen,the films is three phases: Cr,CrN,and Cr₂N.When the ratio of nitrogen / argon is 0 to 40%,the films is transformed from Cr₂N+CrN to Cr₂N+Cr phase,and the preferred orientation of the films is Cr₂N?300?,and the CrN single phase film was not founded in the experiment.