Research On Design Of Automatic Feeding System For Ultrasonic Machining Based On Equivalent Impedance

Ultrasonic machining has been widely used to machine complex shape hole, cavity and forming surface of the semiconductor and the non-conductive hard fragile material because of its unique processing principle and characteristics. The ultrasonic machining equipment is the main factor affecting the machining precision, and has gradually become a hot research in recent years. A series of research on the ultrasonic vibration system and automatic feeding system focus on the technical difficulties of the ultrasonic assisted fixed abrasive machining. The main contents of this paper are as following:1、The ultrasonic vibration system is designed and developed, which mainly focused on the selection of the ultrasonic generator, the design and matching of the sandwich piezoelectric ceramic ultrasonic transducer, the design and simulation of integrated horn-tool.2、An automatic feeding method based on the equivalent impedance is proposed. With the establishment of mechanical model of piezoelectric transducer, the relationship between equivalent impedance and force on series resonant state is obtain by using mechano-electrical analogy. On the basis of these, a new automatic feeding system based on the equivalent, the structure of machine and the control program are designed.3、The performance test of ultrasonic vibration system and the new automatic feeding system is developed. From the perspective of the resonant frequency and the amplitude, the vibration performance of the ultrasonic vibration system is measured using the laser measure instrument. A impedance test platform is built to validate that the equivalent impedance of the ultrasonic vibration system can reflect the state of processing; To verify the control effect of the new automatic feeding system, the programmable constant current ultrasonic power supply is used to machine holes of Si C ceramic by the method of ultrasonic assisted fixed abrasive machining.