Fabrication Of Disk Plate-shaped Array Electrode And Its Application In Micro Hole Machining By ECM

With the development of science and technology,precision has become a tendency in industry.Micro holes and micro-components are essential for the development of the precision industry.Thus,researching on micro machining technology was drawn attention nowadays in the machining field.The advantages of electrochemical micromachining(EMM)over the traditional machining such as stress-free,no tool wear,smooth surface,makes it possible to machining micro holes.Both the application and development of EMM is limited by its large taper,low aspect ratio,seriously stray etching.In this dissertation,on the basis of the relevant theory and previous research,micro array electrodes and electrode with spiral groove are fabricated.Experiments were done by using the fabricated electrodes.Influencing parameters on accuracy,machining speed,processing stability have been studied in detail.In this paper,main work and achievements as follows:1?The electrode molding mechanism was studied based on the electrochemical etching principle.Micro disk plate-shaped electrode and electrode with spiral groove were fabricated by using feasible parameter.2?Finite element method(FEM)was applied to simulate the electric field between the cathode and anode in EMM.The simulation results show that,the disk plate-shaped electrode is better than the traditional columnar electrode in electrochemical micromachining(ECM).Couples of experiments were carried out and verified the better locality,smaller side-gap and hole taper for micro hole drilling by using disk plate-shaped micro electrode.Experimental parameters such as machining voltage,electrolyte concentration,duty ratio are also studied with the disk plate-shaped electrode.3?Under ultrosonic vibration,high aspect ratio micro holes machining technology was prepared by using disk plate-shaped micro electrode.The micro hole with depth of 5.4mm was obtained on SS304 stainless steel sheet,the inlet diameter and outlet diameterof hole was 440?m and 320?m respectively,the taper was 0.022 and the aspect ratio was over 10.4?To meet the requirement of industrial production,FEM and optimal design theory were applied and array electrodes with uniform diameter wer fabricated.Furthermore micro array holes,with depth of 3.8mm and taper of 0.039 were machined on the SS304 stainless steel sheet.